A Fixed-Parameter Approach to 2-Layer Planarization

V Dujmovic, Michael Fellows, M Hallett, M Kitching, G Liotta, C McCartin, N Nishimura, P Ragde, F Rosamond, M Suderman, S Whitesides, David Wood

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)159-182
    Number of pages24
    Issue number2
    Publication statusPublished - 2006

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